We provide the proper error analysis, repair and calibration of high - frequency power supplies for plasma and heating technology, in accordance with their certificates or calibration curves for exact tailoring to your machine and to meet the technical requirements of the equipment manufacturer.
The measurement protocols are added to the repaired device.
In order to make a small contribution to reducing the environmental impact, we also try to obtain spare parts for older models.
The application areas range from the coating and dry etching technology in the semiconductor industry, sensor and thin-film technology, display manufacturing, to heating technology, research and development.
Other model types on request.
| P/N | Type | |
|---|---|---|
| Matching Unit | ||
| ADTEC AMV-4000-40M-EH | ||
| Generator | ||
| AX4000-III-40M-U1 |
| P/N | Type | |
|---|---|---|
| Low Frequency generator (50 ... 450 kHz) | ||
| 3150012-000 | BF5, 500W | |
| 3150010-000 | LF 10, 1000W | |
| 3150058-000 | LF 20, 2000W | |
| 27-032538-00 | LF 30, 3000W | |
| Low Frequency Generator (325 ... 450 KHz) | ||
| 3156012-000 | PDX 2500 | |
| 3156024-031 | PDX 900-2V 350KHZ PFP VDE | |
| 3156024-103/105 | PDX 500 DC BIAS | |
| 3156024-106/110 | PDX 900-2V PFP SACVD CE | |
| 3156024-108 | PDX 1250, 400-450KHZ PFP CE | |
| 3156024-111 | PDX 1250,AFP,325-375KHZ | |
| 3156024-112 | PDX 1250, 400KHZ TO 450KHZ | |
| 3156024-140 | PDX 1400, 235-305KHZ VDE | |
| 3156043-001 | PDX 5000, 330 – 420khz | |
| 3156048-200 | PDX 8000 | |
| Low Frequency Generator 400 KHz | ||
| 3156011-000 | PDW2200 | |
| 3156011-002 ...007 | PDW2200 DIR/CPLR II | |
| High Frequency Generator 13,36 MHz | ||
| 3150004-000 | RF5 , 500W 208 VAC 1 P N | |
| 3150013-000 | RF50, 5000W 208 VAC 3PH DIN | |
| 3150014-000 | RF10 , 1000W 208 VAC 1 PH N | |
| 3150017-000 | FR30, 3000W 208 VAC 3PH DIN | |
| 3150067-000 | RF10M, 1000W 208 VAC 1 PH N | |
| 3150073-000 | RF10 , 1000W 208 VAC 1 PH N CE | |
| 3150073-000 | RF10 , 1000W 208 VAC 1 PH N CE | |
| 3150075-000 | RF20, 2000W 208 VAC 3PH HN CE | |
| 3150077-000 | FR30, 3000W 208 VAC 3PH HN CE | |
| High Frequency generator 13,36 MHz / 600W | ||
| 3155002-000 | RFX600 230V BIO-RAD | |
| 3155082-000 | RFX 600A | |
| High Frequency generator 13,36 MHz / 1250W | ||
| 3155027-000 | RFG1250 HALO | |
| 3155059-026 | RFDS 1250 HARTING LRC | |
| RFXII1250 | ||
| High Frequency generator 13,36 MHz / 2000W | ||
| 3155038-013 | RFDS 2K-2V, CE | |
| 3155053-000 | RFG2000-2V | |
| High Frequency generator 13,36 MHz / 3000W | ||
| 3155038-000 | RFG 3000 | |
| 3155038-011 | RFDS3000 CE | |
| 3155047-000 | RFXII 3000 CE | |
| 3155089-000 | RFG 3001 | |
| 3155089-010 | RFG3002 | |
| High Frequency generator 13,36 MHz/ 5500W | ||
| 3155051-000 | RFG5500 | |
| different generator | ||
| 3150262-000 | Atlas 2012 | |
| 3150852-000 | VHF 2060 | |
| 5155083-113 | HV 8000 | |
| Automatch AZX Tuner 13.56 MHz | ||
| 3155031-000 | AZX 90 | |
| 3155031-014 | AZX 63 | |
| 3155036-000 | AZX10 | |
| various parts | ||
| 1001413 R | AE CESAR 1312 R | |
| 3150274-004 | Mercury 3013 RF Match Matching Network |
| P/N | Type | |
|---|---|---|
| Low Frequency generator (90 ... 460 kHz) | ||
| PL2-HF-11451-55 | Plasmaloc PL-2HF-11451 | |
| High Frequency Generator 13.56 MHz | ||
| OEM-6AM-1 | OEM 6 | |
| OEM-6B-03 | OEM 6B | |
| OEM-6A-11491-51 | OEM 650 | |
| OEM-1250-01 | OEM 1250 | |
| OEM-12A-21041-51 | OEM 12A | |
| OEM12AB3-01 | OEM 12A | |
| OEM-12B-01 | OEM 12B | |
| OEM-12B-02 | OEM 12B | |
| OEM-12B-05 | OEM 12B | |
| OEM-12B3-02 | OEM-12B3 | |
| OEM-12B3-08 | OEM-12B3 | |
| OEM-25N-XL | OEM 25N | |
| OEM-25A-02 | OEM 25XL | |
| OEM-28B-02 | OEM 28B | |
| OEM-28B-04 | OEM 28B | |
| OEM-50N-01-CE | OEM 50 | |
| OEM-50-02 | OEM 50 | |
| ACG-10T | ACG-10T | |
| ACG-10XL | ACG-10XL | |
| ACG-3-11701 | ACG 3 | |
| ACG-3B | ACG-3B | |
| ACG-3XL | ACG-3XL | |
| ACG-5 | ACG-5 | |
| ACG-5J | ACG-5J | |
| ACG-5XL | ACG-5XL | |
| ACG-6 | ACG-6 | |
| ACG-6B-02 | ACG-6B | |
| ACG-10-11631-51 | ACG-10 | |
| ACG-10B-01M9 | ACG-10B |
| P/N | Type | |
|---|---|---|
| Low Frequency Generator | ||
| CLF500H | 500W, 20 – 50 kHz fixed | |
| CLF500 | 500W, 20 – 450 kHz fixed | |
| CLX600H | 600W, 20 – 800 kHz fixed | |
| CLF1000H | 1000W, 20 – 50 kHz fixed | |
| CLF1000 | 1000W, 20 – 450 kHz fixed | |
| CLX1250 | 1250W, 400 kHz & 2 MHz standard | |
| CLX2500 | 2500W, 20 kHz – 2 MHz fixed | |
| CLB3000 | 3000W, 20 kHz – 2 MHz fixed | |
| CLB5000 | 5000W, 20 kHz – 2 MHz fixed | |
| CLF5000 | 5000W, 50 – 450 kHz fixed | |
| CLB6000 | 6000W, 20 kHz – 2 MHz fixed | |
| CLX10000 | 10000W, 400 kHz standard | |
| CLB12K | 12KW, 20 kHz – 2 MHz fixed | |
| High Frequency generator 13.56 MHz and more | ||
| CB50 | 50W, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz standard fixed | |
| CB200 | 200W, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz standard fixed | |
| CB300 | 300W, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz standard fixed | |
| CPS500 | 500W 13.56 MHz – 80 MHz fixed | |
| CB600 | 600W 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz standard fixed | |
| CX600 | 600W, 2 MHz – 30 MHz fixed | |
| CPS1001 | 1000W, 2 MHz – 80 MHz fixed | |
| CB1000 | 1000W, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz standard fixed | |
| CX1250 | 1250W, 2 MHz – 30 MHz fixed | |
| CX2500 | 2500W, 2 MHz – 30 MHz fixed | |
| CX5000 | 5000W, 2 MHz – 30 MHz fixed | |
| CB5000 | 5000W, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz standard fixed | |
| Dual Process Energy Generator | ||
| CDX 1000 | 13.56 MHz, 400kHz | |
| CDX 2000 | 13.56 MHz, 400kHz |
| P/N | Type | |
|---|---|---|
| ES1D80-003054 R | AGA-27 (TEL Unity SCCM 60Mhz Top Generator Daiki) | |
| ES3D80-000793-13 | Telius 60Mhz Top matcher (AMN-50B2) | |
| ES3D39-050149-71 R | Telius(SP) 2Mhz Btm matcher WMN-50, H6A | |
| ES3D39-050149-11 | Telius 2 MHz Bottom Matcher | |
| ES3D80-000148-16 R | Telius (SP) ESC HV Power Supply HV-PS4 |
| P/N | Type | |
|---|---|---|
| CESAR | ||
| various Parts | on Request |
| P/N | Type | |
|---|---|---|
| Trazar matching units | ||
| AMU 10-B | Matrix: 104759 | |
| AMU 10D-2 | Mattson: 914-92003-00 | |
| AMU 10D-3 | Mattson: 553-08663-00 | |
| AMU 10D-4 | Mattson: 553-12708-00 | |
| AMU 10E-1 | Novellus: 27-034223-00 | |
| AMU 10E-2 | Novellus: 27-118072-00 | |
| AMU 10G-1 | Novellus: 27-27-052211-00 | |
| AMU 10H-1 | Mattson: 553-05430-00 | |
| AMU2-1 Vertical | Novellus: 27-121645-00 | |
| AMU2-1 Horizontal | Novellus: 27-032653-00 |
| P/N | Type | |
|---|---|---|
| Matching Units | ||
| RF 3019 | Mattson: 553-21311-00 | |
| RF-711A | Mattson: 553-16428-00 |
| P/N | Type | |
|---|---|---|
| 0010-00854W R | R1 DPS+ POLY RF MATCH | |
| 0010-01929 | RF MATCH, BIASED ELECTRO | |
| 0010-02372 | ASSY, HIGH EFF. RF MATCH AND BIAS W/ FILTER | |
| 0010-02977 | RF-MATCH, SUB ZERO BESC | |
| 0010-04138 | RF MATCH CVD | |
| 0010-09007 | ASSY, CVD RFMATCH DC BIAS | |
| 0010-09416 | ASSY RF MATCH, ETCH/HE | |
| 0010-09417 | ASSY RF MATCH CVD | |
| 0010-09490 | ASSY RF MATCH BW EB | |
| 0010-09750 | ASSY, CVD RFMATCH DC BIAS | |
| 0010-13622 | ASSY VECTRA IMP RF Match | |
| 0010-13627 | wASSY, HIGH EFFICIENCY RF MATCH and BIAS | |
| 0010-13644 | RF MATCH FOR CLEAN | |
| 0010-13878 | ASSY, HIGH EFF. RF MATCH | |
| 0010-15877 | ASSY, RF MATCH, BIASED ELECTRODE | |
| 0010-19085 | RF ICE MATCH 2MHZ, 200MM SIP ENCORE PVD | |
| 0010-19529 | ASSY, HIGH EFF. RF MATCH | |
| 0010-20524 | ASSY/8” RF MATCH MODIFIED | |
| 0010-20525 | MODIFIED 6" RF MATCH | |
| 0010-22161 | RF MATCH FOR CLEAN (0010-13644) | |
| 0010-22225 | MODULES MFG | |
| 0010-26180 | ASSY, HIGH EFF. RF MATCH | |
| 0010-30236 | HEY RF MATCH AND BIAS | |
| 0010-30687 | HEY RF MATCH, ETCH, MXP+ | |
| 0010-36162 | RF MATCH, SIMPLE CATHODE | |
| 0010-36408 | wASSY, RF MATCH, DPS CHAMBER | |
| 0010-36408 | wASSY, RF MATCH, DPS CHAMBER | |
| 0010-39207 | HEY RF MATCH, ETCH, SUPER-E |
We offer RF power supplies for coating and etching systems in semiconductor manufacturing, for industrial applications and for research and development. This includes comprehensive technical advice and the possibility of having your RF power supplies analysed by our specialist staff.
• On-Site analysis of errors in the power coupling
• Electrical measurements inside and outside of the reactor
• Computer-assisted simulation of the characteristic high-frequency quantities in power supplies with fixed and variable impedances
• Calculation of the matching ranges in the case of new technological processes in the plasma and heating technology
• Advice on the Upgrading of existing systems and the delivery of efficient electrodes and cables
• The development and sale of RF generators and automatic matching networks, RF components, and vacuum-compatible current and voltage transformers
We offer courses about the basics of RF power technology for technicians and engineers in the semiconductor manufacturing.
After the completion of the training course, the participants are familiar with the theory and functioning of high frequency power devices on plasma systems.
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