Special Equipment & Coating

Plasma and plant components – Products

• CVD/ PECVD systems, components and upgrades
• Plasma etching systems, components and upgrades
• Electrode systems for CVD/ ALD/ALE, plasma etching
• Technology development
• Planning of gas control systems/ evaporator systems

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Order and contract coating

On request, we can carry out sample or contract coatings according to your wishes with existing PECVD and plasma systems. For coating developments, we are open to your enquiries with our experienced personnel. Our laboratory is equipped for the use of hazardous gases.

Technologies

• Amorphous silicon layers up to 50µm
• Amorphous layers of silicon, solar grade
• Amorphous layers of silicon, boron and phosphorus doped
• Amorphous silicon carbide
• Silicon alloys such as SixNy, SiOx, SiOCH, SIOxNy
• Deposition of hydrophilic and hydrophobic polymer layers
• Organic carbon-containing layers
• Various physical, chemical and plasma etching technologies are also available.
• Other technologies available on request.