For coating, etching and various thin-film systems in the semiconductor industry, sensor, display and solar production as well as the chemical industry and research and development, we offer various components and services for gas and ultra-pure gas technology.
Products
the company Proterial and brands Hitachi/Aera (other types on request)
- Evaporator systems for the production
- Planning of gas control systems, for example for thin film deposition in vacuum
Specifications/data sheets MFC
MFC Hitachi - AERA
MFC Hitachi - SAM
Evaporator systems
| MODEL | AS103-A | AS103-B | AS92F |
|---|---|---|---|
| Precursors | TEOS (400sccm max.) 3DMAS (500sccm max.) HCD (500sccm max.) TICL4 (500sccm max.) TMA, Al(CH3)3 | BTBAS (400sccm max) | TEOS (1.6 SLM max) SiCl4 (1.0 SLM max) |
For more information about Hitachi gas flow products
https://www.proterial.com/e/products/infr/ie/p05_08.html
https://www.us.proterial.com/materials-products/mfc-flow-products.php
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