FAP Plasmatechnik FAP Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden
 
Plasma reactor diagnosis


Application Coating and etching equipment;
Manufacturing and R&D
   
Technical specification • Electric measurements inside and
  outside of the reactor
• Optical emission spectroscopy
• Computer simulation of rf power
  coupling
• Consultation for upgrading of
  available systems and delivery of
  efficient electrodes and power lines
• Development and delivery r.f.
  current/voltage converter
  applicable for vacuum
 


 
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CONTACT

FAP GmbH Dresden
Gostritzer Str. 67 B
01217 Dresden/Germany

Tel.: + 49 351 8718110
Fax: + 49 351 8718416
E-mail: fap.gmbh@online.de


 
 
Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden