FAP Plasmatechnik FAP Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden
 
RF Power Generators


Application Coating and etching equipment in the microelectronic manufacturing, display manufacturing..., R&D
   
Products of
Advanced Energy, Inc.
Product line RFG
RFG 1250, RFG 2000, RFG 3000, RFG 5500, ...

Product line RFD

Product line RFX
RFX 600, RFX 3000, ...
   
Products of
RF Power Products, Inc.
Low Frequency generators
(50 - 450 kHz)

LF5 (500 W), LF 10(1000W), LF 20 (2000W), LF 30 (3000W)

Mid and high Frequency generators
M: 1,7 ... 4,0 MHz, R: 12,56 MHZ, S: 13,56 MHz; P: 27,12 MHz, L: 40,68 MHz
RF 5(500W), RF10 (1000W), RF20 (2000W), ...

Generators for ICP
ICP10P (1000W, 27,12 MHz), ICP20P (2000W, 27,12MHz), ...
   
Products of ENI Low Frequency generators 90... 460 kHz
Plasmaloc PL-2HF-11451, .....

High Frequency generators 13.56 MHz
OEM6, OEM12, OEM25A, ...



Automatic matching networks

Products of
RF Power Products, Inc.
AM5, AM10, AM20, ...
   
Products of
Applied materials
RF-match P5000, Etch; RF-match P5000, CVD; RF-match assy, BW-EB, ...




 
PRODUCTS

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SERVICE

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CONTACT

FAP GmbH Dresden
Gostritzer Str. 67 B
01217 Dresden/Germany

Tel.: + 49 351 8718110
Fax: + 49 351 8718416
E-mail: fap.gmbh@online.de


 
 
Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden