FAP Plasmatechnik FAP Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden
 
PECVD systems


VHF load lock high temperature PECVD system for wafer VPS 200 HT

PECVD system for wafer HP 200

VHF PECVD/etching system for plates VPEM 100

PECVD system for drums TR 500

 
PRODUCTS

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SERVICE

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CONTACT

FAP GmbH Dresden
Gostritzer Str. 67 B
01217 Dresden/Germany

Tel.: + 49 351 8718110
Fax: + 49 351 8718416
E-mail: fap.gmbh@online.de


 
 
Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden