FAP Plasmatechnik FAP Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden
 
Electrode assemblies for the plasma treatment:


Wafers

VHF PECVD reactor with gas sealing VPM 200

VHF PECVD module with helium coupling VPM 200 He

VHF PECVD module for batch processes VPM 360

VHF electrode assembly for high temperature PECVD VPE 100 HT


Plates

VHF PECVD electrode assembly for plane substrates VPE 300/1000

VHF PECVD electrode for plane substrates VPE 300/1000 HT

VHF PECVD reactor with gas sealing VPM 600/2500 HT

VHF PECVD large area electrode assembly VPE 1400/10000


Web, wafer or plates in the continuous substrate flow mode

VHF PECVD line electrode assembly VEM 300 D

VHF PECVD high temperature line electrode assembly VPEC 750 HT

VHF plasma polymerisation electrode assembly VPE 200 RC 


 
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SERVICE

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CONTACT

FAP GmbH Dresden
Gostritzer Str. 67 B
01217 Dresden/Germany

Tel.: + 49 351 8718110
Fax: + 49 351 8718416
E-mail: fap.gmbh@online.de


 
 
Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden