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Electrode assemblies
Wafer
VHF-Elektrode für Hochtemperatur-PECVD VPE 150 HT
VHF PECVD reactor with gas sealing VPM 200
VHF PECVD module with helium coupling VPM 200 He
VHF PECVD module for batch processes VPM 360
VHF electrode assembly for high temperature PECVD VPE 100 HT
Plates
VHF PECVD electrode assembly for plane substrates VPE 300/1000
VHF PECVD electrode for plane substrates VPE 300/1000 HT
VHF PECVD reactor with gas sealing VPM 600/2500 HT
VHF PECVD large area electrode assembly VPE 1400/10000
Web, wafer or plates in the continuous substrate flow mode
VHF PECVD line electrode assembly VEM 300 D
VHF PECVD high temperature line electrode assembly VPEC 750 HT
VHF plasma polymerisation electrode assembly VPE 200 RC
PECVD systems
Plasma sources
Technology, job coating
Service
Electrode assemblies for the plasma treatment:
Wafers
VHF PECVD reactor with gas sealing VPM 200
VHF PECVD module with helium coupling VPM 200 He
VHF PECVD module for batch processes VPM 360
VHF electrode assembly for high temperature PECVD VPE 100 HT
Plates
VHF PECVD electrode assembly for plane substrates VPE 300/1000
VHF PECVD electrode for plane substrates VPE 300/1000 HT
VHF PECVD reactor with gas sealing VPM 600/2500 HT
VHF PECVD large area electrode assembly VPE 1400/10000
Web, wafer or plates in the continuous substrate flow mode
VHF PECVD line electrode assembly VEM 300 D
VHF PECVD high temperature line electrode assembly VPEC 750 HT
VHF plasma polymerisation electrode assembly VPE 200 RC
PRODUCTS
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SERVICE
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CONTACT
FAP GmbH Dresden
Gostritzer Str. 67 B
01217 Dresden/Germany
Tel.: + 49 351 8718110
Fax: + 49 351 8718416
E-mail:
fap.gmbh@online.de
Forschungs- und Applikationslabor Plasmatechnik GmbH Dresden
